Functional nanostructures grown by Focused Electron/Ion Beam Induced Deposition

Datum

11.06.2019

Zeit

13:00 - 14:00

Sprecher

Prof. José María De Teresa

Zugehörigkeit

Institute of Materials Science of Aragon, CSIC-University of Zaragoza, Spain

Sprache

en

Hauptthema

Materialien

Host

Kristina Krummer

Beschreibung

In this talk I will summarize our recent work on the use of focused electron and ion beams in combination with gas and condensed precursors to grow functional nanostructures. Advantages of this set of direct nanomaterials growth techniques are the avoidance of resists, the high resolution attainable, the capability for growth of three-dimensional structures, their use of non-flat substrates and the functionality of the deposited materials. More specifically, I will focus on three types of functionalities: metallic, magnetic and superconducting ones. Metallic deposits grown by Focused Ion Beam Induced Deposition (FIBID) are of interest in circuit editing and for making electrical contacts on nano-objects, with Pt-based or Wbased precursors in the gas phase being used in these applications. We have recently succeeded in the growth of metallic deposits by Ga+-FIBID using a condensed layer of W(CO)6 formed on the substrate under cryogenic conditions (Cryo-FIBID), with obvious advantages due to the low ion irradiation dose required (~ 50 µC/cm2). Magnetic deposits grown by Focused Electron Beam Induced Deposition (FEBID) are of interest to directly grow magnetic tips on cantilevers, with applications in magnetic sensing. We have used Co2(CO)8 and Fe2(CO)9 gas precursors to grow magnetic nanospheres and nanowires on various types of cantilevers, with application in Magnetic Force Microscopy and Ferromagnetic Resonance Force Microscopy. Superconducting deposits grown by Ga+-FIBID using W(CO)6 gas precursor have been found to be of interest to investigate the physics of vortices and to make superconducting contacts to nano-objects. We have recently succeeded in the growth of superconducting nanowires, nanotubes and nanohelixes by He+-FIBID using W(CO)6 gas precursor. The capability of FIBID for the growth of three-dimensional superconducting nanostructures opens new perspectives in the field, which will be discussed.

Links

• Seminars at the IFW

Letztmalig verändert: 24.06.2019, 15:20:44