Towards programmable polymer-based actuators for origami MEMS

Date

Nov 2, 2018

Time

1:00 PM - 2:00 PM

Speaker

Robert Kirchner

Affiliation

TU Dresden, Institute of Semiconductors and Microsystems

Language

en

Main Topic

Materialien

Other Topics

Materialien, Physik

Host

Kristina Krummer

Description

Origami techniques starting with initial 2D structures being subsequently transformed by controlled folding sequences into full 3D shapes are of particular interest for 3D micro- and nanofabrication. Potential fields of applications are, e.g., MEMS, medical drug delivery or smart dust/particle concepts. The major advantage of origami methods is the usage of established planar lithography techniques: the initial 2D structure can be fabricated with very high resolution, accurate placement, high-throughput and in a large set of different materials. Among the different actuation methods for the transformation from 2D into 3D shapes, actuators based on capillary forces and reflowing polymers, as used in this work, are of special interest. We have established a thermoplastic polymer reflow process for 3D topography control and shape transformation. We did recently use this process to actuate out-of-plane movement of micro pillars. This seminar will focus on origami folding of polyhedral microsystems. The origami folding is based on the actuation of released (freestanding) microsystems. I will demonstrate the folding based on capillary forces of softening thermoplastic polymers as well as the programmability of the polymer actuation temperature.

Links

• Seminars at the IFW

Last modified: Nov 2, 2018, 1:06:16 AM